- An X-ray device which emits a beam of electrons which is finely focused on a minute point on the surface of the specimen to be studied. The phenomena resulting from the electron bombardment, such as the characteristic X-rays emitted, and the secondary and backscattered electrons, are then analyzed. It is nondestructive, making it suitable for research in many areas, including crystallography, metallurgy, chemistry, and medicine. Also called electron probe.
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