• A lithographic technique in which precise patterns are created on substrates, such as metals or resins, through the use of photographically-produced masks. Typically, a substrate is coated with a photoresist film, which is dried or hardened, and then exposed through irradiation by light, such as ultraviolet light, shining through the photomask. The unprotected areas are then removed, usually through etching, which leaves the desired patterns. Used, for instance, in the preparation of components, circuits, and devices, such as thin film components, ICs, and printed circuit boards. Also spelled photo-lithography. Also called photolithographic process.

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